APA Style

Park, J., Paik, U. (2009). Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices . : .

MLA Style

Park, Jea-Gun., Paik, Ungyu. "Nanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices". : , 2009. Text.