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Found 1 from your keywords: author="KUBBY, Joel A."
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A Guide to Hands-on MEMS Design and Prototyping
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KUBBY, Joel A.

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modelin…

Edition
Ed. 1
ISBN/ISSN
9780511984662
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