UPA PERPUSTAKAAN UNEJ | NPP. 3509212D1000001

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Found 1 from your keywords: author="Takahata, Kenichi"

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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Micro-electro-mechanical systems, or MEMS, are becoming a vital technology for our society. MEMS technology is increasingly penetrating into our lives and improving our quality of life, similar to what we experienced in the microelectronics revolution

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ISBN/ISSN: 9789535110859
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