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Found 1 from your keywords: author="Werner Karl Schomburg"
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Introduction to Microsystem Design
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Werner Karl Schomburg

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thorough…

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978-3-662-47023-7
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