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Found 1 from your keywords: author="ZHANG Xiao-Sheng"
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Micro/Nano Integrated Fabrication Technology and Its Applications in Microene…
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ZHANG Xiao-Sheng

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e.…

Edition
1
ISBN/ISSN
978-3-662-48814-0
Collation
XX, 122
Series Title
Springer Theses
Call Number
-