Text

Micro and Nano Fabrication

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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Availability

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Detail Information

Series Title

-

Call Number

-

Publisher

: ., 2015

Collation

XXVI, 519

Language

English

ISBN/ISSN

978-3-662-44394-1

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

1

Subject(s)

Processes
Microsystems and MEMS,
Machines,
Tools,

Specific Detail Info

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Statement of Responsibility

Hans H. Gatzen

Other Information

Cataloger

sara

Source

-

Other version/related

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