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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvestin

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This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

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Detail Information

Series Title

Springer Theses

Call Number

-

Publisher

: ., 2016

Collation

XX, 122

Language

English

ISBN/ISSN

978-3-662-48814-0

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

1

Subject(s)

Electronics and Microelectronics
Instrumentation
Microsystems and MEMS
Nanotechnology
Energy Harvesting

Specific Detail Info

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Statement of Responsibility

Xiao-Sheng Zhang

Other Information

Cataloger

Hamdani

Source

-

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