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Nanopositioning Technologies

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This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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Availability

No copy data

Detail Information

Series Title

-

Call Number

-

Publisher

Cham : Springer., 2016

Collation

VI, 409

Language

English

ISBN/ISSN

978-3-319-79539-3

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

1

Subject(s)

Robotics
Engineering Design
Electronics and Microelectronics
Instrumentation
Microsystems and MEMS
Control
Automation

Specific Detail Info

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Statement of Responsibility

Changhai Ru

Other Information

Cataloger

Lika

Source

-

Validator

Taufik

Other version/related

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