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Introduction to Micromechanisms and Microactuators

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This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.

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Detail Information

Series Title

-

Call Number

-

Publisher

: ., 2015

Collation

-

Language

English

ISBN/ISSN

978-81-322-2144-9

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

-

Subject(s)

Mechanical Vibrations

Specific Detail Info

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Statement of Responsibility

Amitabha Ghosh, Burkhard Corves

Other Information

Cataloger

Kholif Basri

Source

https://link.springer.com/book/10.1007/978-81-322-2144-9

Validator

Taufik

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