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Development and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry

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This work discusses an extension to conventional low-coherence interferometry
by the introduction of dispersion-encoding. The extension facilitates the measurement of surface height profiles with sub-nm resolution. The selection of
a dispersive element for encoding allows for tuning of the axial measurement
range and resolution of the setup. The approach is theoretically designed and
implemented for applications such as surface profilometry, the characterization of
polymeric cross-linking and as a tool for the determination of layer thicknesses in
thin-film processing. During the characterization of the implemented setup, it was
shown that an axial measurement range of 79.91m with a resolution of 0.1 nm
was achievable in the evaluation of surface profiles. Simultaneously, profiles of
up to 1.5 mm length could be obtained without the need for mechanical scanning.
This marked a significant improvement in relation to state-of-the-art technologies
in terms of dynamic range. It was also shown that axial and lateral measurement
range can be decoupled partially. Additionally, functional parameters such as surface roughness were characterized with the same tool. The characterization of the
degree of polymeric cross-linking was performed as a function of the refractive
index. Here, the refractive index could be acquired in a spatially-resolved manner
with an index resolution of down to 3.36×10−5. This was achieved by the development of a novel mathematical analysis approach. For the acquisition of layer
thicknesses of thin-films an advanced setup was developed which could be used to
characterize the thickness of thin-films and its (flexible) substrate simultaneously

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Publisher

: Springer Vieweg Wiesbaden., 2022

Collation

XXIII, 163

Language

English

ISBN/ISSN

9783658359263

Classification

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Content Type

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Media Type

computer

Carrier Type

online resource

Edition

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Subject(s)

Development and Characterization of a Dispersion
Encoded Method for Low
Coherence Interferometry Book Open Access © 2022

Specific Detail Info

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Statement of Responsibility

Reynolds Christopher Taudt

Other Information

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angga

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Digital Object Identifier (DOI)

https://link.springer.com/book/10.1007/978-3-658-35926-3

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