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Found 1 from your keywords: subject="Plasma etching"
cover
Dry etching technology for semiconductors
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Kazuo Nojiri

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for eng…

Edition
-
ISBN/ISSN
9783319102955
Collation
126 pages
Series Title
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Call Number
621.3815