Filter by

  • Publication Year
  • Availability
  • Attachment
  • Collection Type
  • General Material Designation
    See More
  • Location
  • Language
Found 1 from your keywords: author=Changhai Ru
cover
Nanopositioning Technologies
Comment Share
Changhai Ru, Xinyu Liu, Yu Sun

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical eng…

Edition
1
ISBN/ISSN
978-3-319-79539-3
Collation
VI, 409
Series Title
-
Call Number
-