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Found 1 from your keywords: author=GATZEN, Hans H.
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Micro and Nano Fabrication
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GATZEN, Hans H.SAILE, volkerLEUTHOLD, Jurg

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization …

Edition
1
ISBN/ISSN
978-3-662-44394-1
Collation
XXVI, 519
Series Title
-
Call Number
-