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Found 1 from your keywords: author=Martin, Nicolas
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Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
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Martin, NicolasPalmero, Alberto

Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured…

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9783039364305
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148 hlm; ill., lamp.,
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