Filter by

  • Publication Year
  • Availability
  • Attachment
  • Collection Type
  • General Material Designation
    See More
  • Location
  • Language
Found 1 from your keywords: author=Park, Jea-Gun
cover
Nanoparticle engineering for chemical-mechanical planarization: fabrication o…
Comment Share
Paik, UngyuPark, Jea-Gun

ABSTRACT In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is…

Edition
-
ISBN/ISSN
9780429291890
Collation
224 p
Series Title
-
Call Number
-