Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvestin

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Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvestin

ZHANG Xiao-Sheng - Personal Name;

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.

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Series Title: Springer Theses
Call Number: -
Publisher: : ., 2016
Collation: XX, 122
Language: English
ISBN/ISSN: 978-3-662-48814-0
Classification: NONE
Content Type: -
Media Type: -
Carrier Type: -
Edition: 1
Subject(s): Electronics and Microelectronics
Instrumentation
Microsystems and MEMS
Nanotechnology
Energy Harvesting
Specific Detail Info: -
Statement of Responsibility: Xiao-Sheng Zhang

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Cataloger: Hamdani
Source: -

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