Introduction to Microsystem Design | OPEN EDUCATIONAL RESOURCES

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Introduction to Microsystem Design

Werner Karl Schomburg - Personal Name;

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

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Series Title: -
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Publisher: : ., 2015
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Language: English
ISBN/ISSN: 978-3-662-47023-7
Classification: NONE
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Subject(s): Microsystems and MEMS
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Statement of Responsibility: Werner Karl Schomburg

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Cataloger: Kholif Basri
Source: https://link.springer.com/book/10.1007/978-3-662-47023-7
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