Text

A Guide to Hands-on MEMS Design and Prototyping

---

Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

---

Availability

No copy data

Detail Information

Series Title

-

Call Number

-

Publisher

: Cambridge University Press., 2011

Collation

-

Language

English

ISBN/ISSN

9780511984662

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

Ed. 1

Subject(s)

Engineering Design
Engineering,
Kinematics, and Robotics

Specific Detail Info

-

Statement of Responsibility

Joel A. Kubby,

Other Information

Cataloger

Arin

Source

https://www.cambridge.org/core/books/guide-to-handson-mems-design-and-prototyping/21D6823D820A3157DA21B89628BDD4AB#fndtn-information

Validator

maya

Digital Object Identifier (DOI)

https://doi.org/10.1017/CBO9780511984662

Journal Volume

-

Journal Issue

-

Subtitle

-

Parallel Title

-

Other version/related

File Attachment

Comments

---

You must be logged in to post a comment