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Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

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Micro-electro-mechanical systems, or MEMS, are becoming a vital technology for our society.
MEMS technology is increasingly penetrating into our lives and improving our quality of life,
similar to what we experienced in the microelectronics revolution

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Detail Information

Series Title

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Call Number

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Publisher

: IntechOpen,., 2013

Collation

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Language

English

ISBN/ISSN

9789535110859

Classification

NONE

Content Type

text

Media Type

computer

Carrier Type

online resource

Edition

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Subject(s)

Micro/Nano Electromechanical Systems
Fabrication Technologies

Specific Detail Info

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Statement of Responsibility

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Other Information

Cataloger

Angga

Source

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Validator

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Digital Object Identifier (DOI)

https://mts.intechopen.com/storage/books/3332/authors_book/authors_book.pdf

Journal Volume

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Journal Issue

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Subtitle

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Parallel Title

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