This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e.…
TC S361, like most OUHK courses, is presented in the distance learning mode using print-based materials. The materials for this module have been specially adapted to make them more suitable for studying online