This monograph provides a field-proven approach to analyze industrial production with a cross-company scope as well as regarding all hierarchical system levels of manufacturing enterprises. The book exemplifies this approach in the context of aluminum die casting, and presents a set of measures which allow a 30 percent energy reduction along the value chain. The target audience primarily compri…
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization …